ELENA KAMMANN - ER4
Attocube will develop a novel low-temperature lithography system with sub-mn resolution. Prototypes will initially be built and tested for research groups, leading to a commercial system. This system will be used for in-situ lithography of InGaAs and InP QD samples for fabrication of photonic structures and photonic structures in diamond.
email address – Elena.Kammann@attocube.com
Host organisation (principal node)
Role within S3Nano