ELENA KAMMANN - ER4

Attocube will develop a novel low-temperature lithography system with sub-mn resolution. Prototypes will initially be built and tested for research groups, leading to a commercial system. This system will be used for in-situ lithography of InGaAs and InP QD samples for fabrication of photonic structures and photonic structures in diamond.

email address – Elena.Kammann@attocube.com

Host organisation (principal node)
attocube
http://www.attocube.com/

Role within S3Nano

Personal profile